- Title
- Round Robin: measurement of H implantation distributions in Si by elastic recoil detection
- Creators
- G BoudreaultRG EllimanR GrotzschelSC GujrathiC JeynesWN LennardE RauhalaT SajavaaraH TimmersYQ WangTDM Weijers
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.222(3-4), pp.547-566
- Publisher
- ELSEVIER SCIENCE BV
- Date published
- 01/08/2004
- Date submitted
- 24/10/2014
- Identifiers
- 99515189902346
- Academic Unit
- University of Surrey
- Language
- English
- Resource Type
- Journal article
Journal article
Round Robin: measurement of H implantation distributions in Si by elastic recoil detection
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.222(3-4), pp.547-566
01/08/2004
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