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Room temperature growth of indium-tin oxide on organic flexible polymer substrates using a new reactive-sputter deposition technology
Journal article   Open access  Peer reviewed

Room temperature growth of indium-tin oxide on organic flexible polymer substrates using a new reactive-sputter deposition technology

Jose Anguita, M Thwaites, B Holton, P Hockley, S Rand and S Haughton
PLASMA PROCESSES AND POLYMERS, Vol.4(1), pp.48-52
05/01/2007
DOI: https://doi.org/10.1002/ppap.200600047

Abstract

Science & Technology Physical Sciences Physics Applied Physics Fluids & Plasmas Physics Condensed Matter Polymer Science Physics flat panel displays flexible displays indium tin oxide (ITO) process control room temperature growth sputtering LIGHT-EMITTING-DIODES LAYER
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