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Rearrangement of the oxide-semiconductor interface in annealed Al2O3/4H-SiC structures
Journal article   Open access  Peer reviewed

Rearrangement of the oxide-semiconductor interface in annealed Al2O3/4H-SiC structures

M Avice, S Diplas, A Thogersen, JS Christensen, U Grossner, BG Svensson, O Nilsen, H Fjellvag and JF Watts
APPLIED PHYSICS LETTERS, Vol.91(5), pp.?-?
30/07/2007

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Science & Technology Physical Sciences Physics Applied Physics PHYSICS APPLIED FILMS THIN
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