RAPID ELECTRON-BEAM REACTED TANTALUM TITANIUM BILAYERS ON SILICON

VK RAMAN; F MAHMOOD; RA MCMAHON; H AHMED; C JEYNES

doi:10.1143/JJAP.27.2333

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RAPID ELECTRON-BEAM REACTED TANTALUM TITANIUM BILAYERS ON SILICON

Journal article

Peer reviewed

RAPID ELECTRON-BEAM REACTED TANTALUM TITANIUM BILAYERS ON SILICON

VK RAMAN, F MAHMOOD, RA MCMAHON, H AHMED and C JEYNES

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol.27(12), pp.2333-2339

01/12/1988

DOI: https://doi.org/10.1143/JJAP.27.2333

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

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Title: RAPID ELECTRON-BEAM REACTED TANTALUM TITANIUM BILAYERS ON SILICON
Creators: VK RAMAN
F MAHMOOD
RA MCMAHON
H AHMED
C JEYNES
Publication Details: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol.27(12), pp.2333-2339
Publisher: JAPAN J APPLIED PHYSICS
Date published: 01/12/1988
Date submitted: 17/05/2017
Identifiers: 99513880402346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

RAPID ELECTRON-BEAM REACTED TANTALUM TITANIUM BILAYERS ON SILICON

Abstract

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