RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

VK RAMAN; F MAHMOOD; RA MCMAHON; H AHMED; C JEYNES; D SARKAR

doi:10.1016/0169-4332(89)90962-8

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RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

Journal article

Peer reviewed

RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

VK RAMAN, F MAHMOOD, RA MCMAHON, H AHMED, C JEYNES and D SARKAR

APPLIED SURFACE SCIENCE, Vol.36(1-4), pp.654-663

01/01/1989

DOI: https://doi.org/10.1016/0169-4332(89)90962-8

Abstract

Science & Technology

Physical Sciences

Technology

Chemistry

Physical

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Chemistry

Materials Science

Physics

CHEMISTRY

PHYSICAL

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

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Title: RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS
Creators: VK RAMAN
F MAHMOOD
RA MCMAHON
H AHMED
C JEYNES
D SARKAR
Publication Details: APPLIED SURFACE SCIENCE, Vol.36(1-4), pp.654-663
Publisher: ELSEVIER SCIENCE BV
Date published: 01/01/1989
Date submitted: 17/05/2017
Identifiers: 99513877002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

Abstract

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