RAPID ANALYSIS OF SIPOS FILMS BY ELASTIC BACKSCATTERING AND RBS

C JEYNES; RE MILES; M BOLT; JG SIMMONS

doi:10.1016/0168-583X(86)90302-2

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RAPID ANALYSIS OF SIPOS FILMS BY ELASTIC BACKSCATTERING AND RBS

C JEYNES, RE MILES, M BOLT and JG SIMMONS

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.15(1-6), pp.275-279

01/04/1986

DOI: https://doi.org/10.1016/0168-583X(86)90302-2

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

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Title: RAPID ANALYSIS OF SIPOS FILMS BY ELASTIC BACKSCATTERING AND RBS
Creators: C JEYNES
RE MILES
M BOLT
JG SIMMONS
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.15(1-6), pp.275-279
Publisher: ELSEVIER SCIENCE BV
Date published: 01/04/1986
Date submitted: 17/05/2017
Identifiers: 99511116602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

RAPID ANALYSIS OF SIPOS FILMS BY ELASTIC BACKSCATTERING AND RBS

Abstract

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