Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum are technique

LK Cheah; X Shi; JR Shi; EJ Liu; SRP Silva

doi:10.1016/S0022-3093(98)00787-X

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Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum are technique

Journal article

Peer reviewed

Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum are technique

LK Cheah, X Shi, JR Shi, EJ Liu and SRP Silva

JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol.242(1), pp.40-48

01/12/1998

DOI: https://doi.org/10.1016/S0022-3093(98)00787-X

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

Multidisciplinary

Materials Science

MATERIALS SCIENCE

CERAMICS

MATERIALS SCIENCE

MULTIDISCIPLINARY

DIAMOND-LIKE CARBON

DEPOSITION

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Title: Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum are technique
Creators: LK Cheah
X Shi
JR Shi
EJ Liu
SRP Silva
Publication Details: JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol.242(1), pp.40-48
Publisher: ELSEVIER SCIENCE BV
Date published: 01/12/1998
Date submitted: 17/05/2017
Identifiers: 99510941902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum are technique

Abstract

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