Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy

S Xu; BK Tay; HS Tan; L Zhong; YQ Tu; SRP Silva; WI Milne

doi:10.1063/1.361440

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Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy

Journal article

Peer reviewed

Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy

S Xu, BK Tay, HS Tan, L Zhong, YQ Tu, SRP Silva and WI Milne

JOURNAL OF APPLIED PHYSICS, Vol.79(9), pp.7234-7240

01/05/1996

DOI: https://doi.org/10.1063/1.361440

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

DIAMOND-LIKE CARBON

ARC EVAPORATION

STRESS

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Title: Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy
Creators: S Xu
BK Tay
HS Tan
L Zhong
YQ Tu
SRP Silva
WI Milne
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.79(9), pp.7234-7240
Publisher: AMER INST PHYSICS
Date published: 01/05/1996
Date submitted: 17/05/2017
Identifiers: 99511562002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy

Abstract

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