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Plasma jet based in situ reduction of copper oxide in direct write printing
Journal article   Peer reviewed

Plasma jet based in situ reduction of copper oxide in direct write printing

Avishek Dey, Arlene Lopez, Gregor Filipic, Aditya Jayan, Dennis Nordlund, Jessica Koehne, Satheesh Krishnamurthy, Ram P. Gandhiraman, M. Meyyappan and SLAC National Accelerator Lab., Menlo Park, CA (United States)
Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol.37(3), 031203
01/05/2019

Abstract

Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Science & Technology Science & Technology - Other Topics Engineering Physical Sciences Physics Technology

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