Patterned low temperature copper-rich deposits using inkjet printing

GG Rozenberg; E Bresler; SP Speakman; C Jeynes; JHG Steinke

doi:10.1063/1.1481985

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Patterned low temperature copper-rich deposits using inkjet printing

Journal article

Peer reviewed

Patterned low temperature copper-rich deposits using inkjet printing

GG Rozenberg, E Bresler, SP Speakman, C Jeynes and JHG Steinke

APPLIED PHYSICS LETTERS, Vol.81(27), pp.5249-5251

30/12/2002

DOI: https://doi.org/10.1063/1.1481985

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

CHEMICAL-VAPOR-DEPOSITION

RUTHERFORD BACKSCATTERING DATA

THIN-FILMS

SELECTIVE METALLIZATION

ANNEALING ANALYSIS

ERROR ANALYSIS

SILICON

PRECURSOR

STEP

CVD

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Title: Patterned low temperature copper-rich deposits using inkjet printing
Creators: GG Rozenberg
E Bresler
SP Speakman
C Jeynes
JHG Steinke
Publication Details: APPLIED PHYSICS LETTERS, Vol.81(27), pp.5249-5251
Publisher: AMER INST PHYSICS
Date published: 30/12/2002
Date submitted: 17/05/2017
Identifiers: 99514018202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Patterned low temperature copper-rich deposits using inkjet printing

Abstract

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