Patterned ion beam implantation of Co ions into a SiO2 thin film via ordered nanoporous alumina masks

W Guan; J Ghatak; Y Peng; N Peng; C Jeynes; B Inkson; G Moebus

doi:10.1088/0957-4484/23/4/045605

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Patterned ion beam implantation of Co ions into a SiO2 thin film via ordered nanoporous alumina masks

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Patterned ion beam implantation of Co ions into a SiO2 thin film via ordered nanoporous alumina masks

W Guan, J Ghatak, Y Peng, N Peng, C Jeynes, B Inkson and G Moebus

NANOTECHNOLOGY, Vol.23(4), ARTN 0

03/02/2012

DOI: https://doi.org/10.1088/0957-4484/23/4/045605

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Title: Patterned ion beam implantation of Co ions into a SiO2 thin film via ordered nanoporous alumina masks
Creators: W Guan
J Ghatak
Y Peng
N Peng
C Jeynes
B Inkson
G Moebus
Publication Details: NANOTECHNOLOGY, Vol.23(4), ARTN 0
Date published: 03/02/2012
Date submitted: 23/10/2014
Identifiers: 99511329902346
Academic Unit: University of Surrey
Resource Type: Journal article

Patterned ion beam implantation of Co ions into a SiO2 thin film via ordered nanoporous alumina masks

Abstract

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