Patterned crack-free PZT thick films for micro-electromechanical system applications

F Dauchy; RA Dorey

doi:10.1007/s00170-007-0968-1

Back

Patterned crack-free PZT thick films for micro-electromechanical system applications

Journal article

Peer reviewed

Patterned crack-free PZT thick films for micro-electromechanical system applications

F Dauchy and RA Dorey

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, Vol.33(1-2), pp.86-94

01/01/2007

DOI: https://doi.org/10.1007/s00170-007-0968-1

Abstract

Science & Technology

Technology

Automation & Control Systems

Engineering

Manufacturing

Engineering

AUTOMATION & CONTROL SYSTEMS

ENGINEERING

MANUFACTURING

sol gel

thick film

MEMS

multilayer

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000247265900012&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

60 Record Views

30 Times Cited - Web of Science

See more details

Details

Title: Patterned crack-free PZT thick films for micro-electromechanical system applications
Creators: F Dauchy
RA Dorey
Publication Details: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, Vol.33(1-2), pp.86-94
Publisher: SPRINGER LONDON LTD
Date published: 01/01/2007
Date submitted: 17/05/2017
Identifiers: 99512706502346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Patterned crack-free PZT thick films for micro-electromechanical system applications

Abstract

Files and links (1)

Metrics

Details

Usage Policy