PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

MBH BREESE; F WATT; GW GRIME; PJC KING

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PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

Journal article

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PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

MBH BREESE, F WATT, GW GRIME and PJC KING

INSTITUTE OF PHYSICS CONFERENCE SERIES, (117), pp.101-104

01/01/1991

Abstract

Science & Technology

Physical Sciences

Physics

Multidisciplinary

Physics

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Title: PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE
Creators: MBH BREESE
F WATT
GW GRIME
PJC KING
Publication Details: INSTITUTE OF PHYSICS CONFERENCE SERIES, (117), pp.101-104
Publisher: IOP PUBLISHING LTD
Date published: 01/01/1991
Date submitted: 17/05/2017
Identifiers: 99515299302346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

Abstract

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