PARTICLE ENERGY-LOSS SPECTROSCOPY AND SEM STUDIES OF TOPOGRAPHY DEVELOPMENT IN THIN ALUMINUM FILMS IMPLANTED WITH HIGH-DOSES OF HELIUM

KM BARFOOT; RP WEBB; SE DONNELLY

doi:10.1016/0042-207X(84)90158-1

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PARTICLE ENERGY-LOSS SPECTROSCOPY AND SEM STUDIES OF TOPOGRAPHY DEVELOPMENT IN THIN ALUMINUM FILMS IMPLANTED WITH HIGH-DOSES OF HELIUM

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PARTICLE ENERGY-LOSS SPECTROSCOPY AND SEM STUDIES OF TOPOGRAPHY DEVELOPMENT IN THIN ALUMINUM FILMS IMPLANTED WITH HIGH-DOSES OF HELIUM

KM BARFOOT, RP WEBB and SE DONNELLY

VACUUM, Vol.34(10-1), pp.825-829

01/01/1984

DOI: https://doi.org/10.1016/0042-207X(84)90158-1

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

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Title: PARTICLE ENERGY-LOSS SPECTROSCOPY AND SEM STUDIES OF TOPOGRAPHY DEVELOPMENT IN THIN ALUMINUM FILMS IMPLANTED WITH HIGH-DOSES OF HELIUM
Creators: KM BARFOOT
RP WEBB
SE DONNELLY
Publication Details: VACUUM, Vol.34(10-1), pp.825-829
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Date published: 01/01/1984
Date submitted: 17/05/2017
Identifiers: 99516977502346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

PARTICLE ENERGY-LOSS SPECTROSCOPY AND SEM STUDIES OF TOPOGRAPHY DEVELOPMENT IN THIN ALUMINUM FILMS IMPLANTED WITH HIGH-DOSES OF HELIUM

Abstract

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