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Oxygen enrichment of silicon wafer by ion implantation method and fabrication of surface barrier detectors
Journal article   Peer reviewed

Oxygen enrichment of silicon wafer by ion implantation method and fabrication of surface barrier detectors

SK Chaudhuri, PV Rajesh, SS Ghugre and D Das
Defect and Diffusion Forum, Vol.245-24, pp.23-28
01/12/2005

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