ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE

IH WILSON; S CHERECKDJIAN; RP WEBB

doi:10.1016/0168-583X(85)90461-6

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ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE

Journal article

Peer reviewed

ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE

IH WILSON, S CHERECKDJIAN and RP WEBB

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.7-8(MAR), pp.735-741

01/01/1985

DOI: https://doi.org/10.1016/0168-583X(85)90461-6

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

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Title: ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE
Creators: IH WILSON
S CHERECKDJIAN
RP WEBB
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.7-8(MAR), pp.735-741
Publisher: ELSEVIER SCIENCE BV
Date published: 01/01/1985
Date submitted: 17/05/2017
Identifiers: 99517019002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE

Abstract

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