New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

SF Belykh; VV Palitsin; IV Veryovkin; AP Kovarsky; RJH Chang; A Adriaens; MG Dowsett; F Adams

doi:10.1063/1.2761021

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New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

Journal article

Peer reviewed

New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

SF Belykh, VV Palitsin, IV Veryovkin, AP Kovarsky, RJH Chang, A Adriaens, MG Dowsett and F Adams

REVIEW OF SCIENTIFIC INSTRUMENTS, Vol.78(8), ARTN 08510

08/2007

DOI: https://doi.org/10.1063/1.2761021

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Title: New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications
Creators: SF Belykh
VV Palitsin
IV Veryovkin
AP Kovarsky
RJH Chang
A Adriaens
MG Dowsett
F Adams
Publication Details: REVIEW OF SCIENTIFIC INSTRUMENTS, Vol.78(8), ARTN 08510
Date published: 08/2007
Date submitted: 17/05/2017
Identifiers: 99515555402346
Academic Unit: University of Surrey
Resource Type: Journal article

New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

Abstract

Files and links (1)

Metrics

Details

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