Nanopatterning by ion implantation through nanoporous alumina masks

W Guan; IM Ross; UM Bhatta; J Ghatak; N Peng; BJ Inkson; G Moebus

doi:10.1039/c3cp50196e

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Journal article

Nanopatterning by ion implantation through nanoporous alumina masks

W Guan, IM Ross, UM Bhatta, J Ghatak, N Peng, BJ Inkson and G Moebus

PHYSICAL CHEMISTRY CHEMICAL PHYSICS, Vol.15(12), pp.4291-4296

01/01/2013

DOI: https://doi.org/10.1039/c3cp50196e

Abstract

Science & Technology

Physical Sciences

Chemistry

Physical

Physics

Atomic

Molecular & Chemical

Chemistry

Physics

CHEMISTRY

PHYSICAL

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

TIO2 SINGLE-CRYSTALS

ANODIC ALUMINA

FABRICATION

LITHOGRAPHY

ARRAYS

NANOPARTICLES

NANOCLUSTERS

MICROSCOPY

SILICA

GROWTH

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Title: Nanopatterning by ion implantation through nanoporous alumina masks
Creators: W Guan
IM Ross
UM Bhatta
J Ghatak
N Peng
BJ Inkson
G Moebus
Publication Details: PHYSICAL CHEMISTRY CHEMICAL PHYSICS, Vol.15(12), pp.4291-4296
Publisher: ROYAL SOC CHEMISTRY
Date published: 01/01/2013
Date submitted: 17/05/2017
Identifiers: 99516748802346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Nanopatterning by ion implantation through nanoporous alumina masks

Abstract

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