Abstract
Niobium-based nanobridge superconducting quantum interference devices (SQUIDs) have shown very low noise performance and high-frequency operation. We describe how we are bringing together these two aspects of nanobridge SQUIDs with the aim of realizing single spin-flip detection using microwave inductive readout techniques, where the nanobridge SQUID is integrated into a superconducting coplanar waveguide resonator. Using electron beam lithography (EBL) is ideal for fabricating nanobridge junctions and has the advantage of being easily scalable compared to using a focused ion beam. In this article, we demonstrate that EBL is suitable for fabricating nanobridge junction SQUIDs, and they exhibit very comparable performance to previous focused ion beam milled SQUIDs. Our integrated devices show potential to be used for flux-tunable sensors.