Micro-PIXE and Micro-RBS Characterization of Micropores in Porous Silicon Prepared Using Microwave-Assisted Hydrofluoric Acid Etching

M Ahmad; GW Grime

doi:10.1017/S1431927612014262

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Micro-PIXE and Micro-RBS Characterization of Micropores in Porous Silicon Prepared Using Microwave-Assisted Hydrofluoric Acid Etching

Journal article

Peer reviewed

Micro-PIXE and Micro-RBS Characterization of Micropores in Porous Silicon Prepared Using Microwave-Assisted Hydrofluoric Acid Etching

M Ahmad and GW Grime

MICROSCOPY AND MICROANALYSIS, Vol.19(2), pp.261-267

01/04/2013

DOI: https://doi.org/10.1017/S1431927612014262

Abstract

Science & Technology

Technology

Materials Science

Multidisciplinary

Microscopy

Materials Science

MATERIALS SCIENCE

MULTIDISCIPLINARY

MICROSCOPY

microprobe

micro-PIXE

micro-RBS

SEM

porous silicon

microwave etching

SURFACE-TOPOGRAPHY

HF

PERFORMANCE

BIOSENSOR

FACILITY

CELLS

LAYER

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Title: Micro-PIXE and Micro-RBS Characterization of Micropores in Porous Silicon Prepared Using Microwave-Assisted Hydrofluoric Acid Etching
Creators: M Ahmad
GW Grime
Publication Details: MICROSCOPY AND MICROANALYSIS, Vol.19(2), pp.261-267
Publisher: CAMBRIDGE UNIV PRESS
Date published: 01/04/2013
Date submitted: 17/05/2017
Identifiers: 99513780602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Micro-PIXE and Micro-RBS Characterization of Micropores in Porous Silicon Prepared Using Microwave-Assisted Hydrofluoric Acid Etching

Abstract

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