Abstract
InAlAs layers and InGaAs/InAlAs quantum well heterostructures, grown by molecular beam epitaxy on vicinal (1 1 1)B InP substrates, exhibited extensive surface step bunching, compositional inhomogeneities and degraded crystalline quality, with variations depending on the exact misfit strain and growth conditions. Silicon and beryllium doping of (1 1 1) InAlAs behaved similarly to the (1 0 0) case but a different predominant deep level was detected in n-type (1 1 1) material.