Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

BJ Pawlak; NEB Cowern; C Ahn; W Vandervorst; R Gwilliam; JGM van Berkum

doi:10.1063/1.4902972

Back

Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

Journal article

Peer reviewed

Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

BJ Pawlak, NEB Cowern, C Ahn, W Vandervorst, R Gwilliam and JGM van Berkum

APPLIED PHYSICS LETTERS, Vol.105(22), ARTN 22160

01/12/2014

DOI: https://doi.org/10.1063/1.4902972

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

INTERSTITIAL CLUSTERS

ROOM-TEMPERATURE

SILICON

IMPLANTATION

DISSOLUTION

ACTIVATION

MECHANISMS

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000346265200021&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

12 Record Views

3 Times Cited - Web of Science

Details

Title: Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si
Creators: BJ Pawlak
NEB Cowern
C Ahn
W Vandervorst
R Gwilliam
JGM van Berkum
Publication Details: APPLIED PHYSICS LETTERS, Vol.105(22), ARTN 22160
Publisher: AMER INST PHYSICS
Date published: 01/12/2014
Date submitted: 17/05/2017
Identifiers: 99512173002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

Abstract

Files and links (1)

Metrics

Details

Usage Policy