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Isotopically Enriched Layers for Quantum Computers Formed by 28Si Implantation and Layer Exchange
Journal article   Open access   Peer reviewed

Isotopically Enriched Layers for Quantum Computers Formed by 28Si Implantation and Layer Exchange

Ella Schneider and Jonathan England
ACS Applied Materials and Interfaces, Vol.15(17), pp.21609-21617
03/05/2023

Abstract

ion implantation isotopically pure layers metal induced layer exchange quantum computing semiconductor
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