Ion beam patterning

Journal article

Ion beam patterning

pp.184-217

01/09/2005

DOI: https://doi.org/10.1533/9781845690908.184

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Title: Ion beam patterning
Creators: GW Grime
Publication Details: pp.184-217
Date published: 01/09/2005
Date submitted: 17/05/2017
Identifiers: 99512396102346
Academic Unit: University of Surrey
Resource Type: Journal article