Integrating functional ceramics into microsystems

RA Dorey; SA Rocks; F Dauchy; D Wang; F Bortolani; E Hugo

doi:10.1016/j.jeurceramsoc.2007.12.003

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Integrating functional ceramics into microsystems

Journal article

Peer reviewed

Integrating functional ceramics into microsystems

RA Dorey, SA Rocks, F Dauchy, D Wang, F Bortolani and E Hugo

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.28(7), pp.1397-1403

01/01/2008

DOI: https://doi.org/10.1016/j.jeurceramsoc.2007.12.003

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

films

shaping

sol-gel processes

PZT

functional applications

COMPOSITE THICK-FILMS

DIRECT-WRITE FABRICATION

PIEZOELECTRIC PROPERTIES

PZT CERAMICS

SILICON

SYSTEMS

MEMS

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Title: Integrating functional ceramics into microsystems
Creators: RA Dorey
SA Rocks
F Dauchy
D Wang
F Bortolani
E Hugo
Publication Details: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.28(7), pp.1397-1403
Publisher: ELSEVIER SCI LTD
Date published: 01/01/2008
Date submitted: 17/05/2017
Identifiers: 99512586202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Integrating functional ceramics into microsystems

Abstract

Files and links (1)

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