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Integrated temperature sensor in Er-doped silicon
Journal article   Peer reviewed

Integrated temperature sensor in Er-doped silicon

AK Kewell, GT Reed and F Namavar
SENSORS AND ACTUATORS A-PHYSICAL, Vol.65(2-3), pp.160-164
15/03/1998

Abstract

Science & Technology Technology Engineering Electrical & Electronic Instruments & Instrumentation Engineering ENGINEERING ELECTRICAL & ELECTRONIC INSTRUMENTS & INSTRUMENTATION temperature sensors Er-doped silicon luminescence micromachining WAVE-GUIDE LUMINESCENCE SEMICONDUCTORS SI
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