Improving electron emission properties of SiC layers by introducing electrically conductive clusters using ion implantation

Journal article

WM Tsang, SP Wong, JKN Lindner and SRP Silva

Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005, Vol.2005, pp.54-55

01/12/2005

Abstract

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Title: Improving electron emission properties of SiC layers by introducing electrically conductive clusters using ion implantation
Creators: WM Tsang
SP Wong
JKN Lindner
SRP Silva
Publication Details: Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005, Vol.2005, pp.54-55
Date published: 01/12/2005
Date submitted: 17/05/2017
Identifiers: 99514848602346
Academic Unit: University of Surrey
Resource Type: Journal article