INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA

GAJ AMARATUNGA; SRP SILVA; DR MCKENZIE

doi:10.1063/1.350219

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INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA

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INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA

GAJ AMARATUNGA, SRP SILVA and DR MCKENZIE

JOURNAL OF APPLIED PHYSICS, Vol.70(10), pp.5374-5379

15/11/1991

DOI: https://doi.org/10.1063/1.350219

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Science & Technology

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Title: INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA
Creators: GAJ AMARATUNGA
SRP SILVA
DR MCKENZIE
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.70(10), pp.5374-5379
Publisher: AMER INST PHYSICS
Date published: 15/11/1991
Date submitted: 24/09/2010
Identifiers: 99513613602346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA

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