IDENTIFICATION OF COSI INCLUSIONS WITHIN BURIED COSI2 LAYERS FORMED BY ION-IMPLANTATION

A DEVEIRMAN; J VANLANDUYT; KJ REESON; R GWILLIAM; C JEYNES; BJ SEALY

doi:10.1063/1.346308

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IDENTIFICATION OF COSI INCLUSIONS WITHIN BURIED COSI2 LAYERS FORMED BY ION-IMPLANTATION

Journal article

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IDENTIFICATION OF COSI INCLUSIONS WITHIN BURIED COSI2 LAYERS FORMED BY ION-IMPLANTATION

A DEVEIRMAN, J VANLANDUYT, KJ REESON, R GWILLIAM, C JEYNES and BJ SEALY

JOURNAL OF APPLIED PHYSICS, Vol.68(7), pp.3792-3794

01/10/1990

DOI: https://doi.org/10.1063/1.346308

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

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Title: IDENTIFICATION OF COSI INCLUSIONS WITHIN BURIED COSI2 LAYERS FORMED BY ION-IMPLANTATION
Creators: A DEVEIRMAN
J VANLANDUYT
KJ REESON
R GWILLIAM
C JEYNES
BJ SEALY
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.68(7), pp.3792-3794
Publisher: AMER INST PHYSICS
Date published: 01/10/1990
Date submitted: 17/05/2017
Identifiers: 99516907602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

IDENTIFICATION OF COSI INCLUSIONS WITHIN BURIED COSI2 LAYERS FORMED BY ION-IMPLANTATION

Abstract

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