High speed silicon optical modulator with self-aligned fabrication process

DJ Thomson; FY Gardes; GT Reed; J-M Fedeli

doi:10.1109/GROUP4.2010.5643421

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High speed silicon optical modulator with self-aligned fabrication process

Journal article

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Peer reviewed

High speed silicon optical modulator with self-aligned fabrication process

DJ Thomson, FY Gardes, GT Reed and J-M Fedeli

IEEE 7th International Conference on Group IV Photonics, pp.81-83

Group IV Photonics (Beijing, China, 01/09/2010 - 03/09/2010)

01/09/2010

DOI: https://doi.org/10.1109/GROUP4.2010.5643421

Abstract

Electronic and photonic devices formed using self-aligned processes are attractive for reducing performance variations and increasing yield. In this paper a novel high speed silicon optical modulator which has self-aligned pn junction formation is introduced.

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Title: High speed silicon optical modulator with self-aligned fabrication process
Creators: DJ Thomson
FY Gardes
GT Reed
J-M Fedeli
Contributors: IEEE (null)
Publication Details: IEEE 7th International Conference on Group IV Photonics, pp.81-83
Event: Group IV Photonics (Beijing, China, 01/09/2010 - 03/09/2010)
Date published: 01/09/2010
Date submitted: 16/11/2011
Identifiers: 99514535002346
Academic Unit: School of Computer Science and Electronic Engineering
Resource Type: Journal article

High speed silicon optical modulator with self-aligned fabrication process

Abstract

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