High accuracy traceable Rutherford backscattering spectrometry of ion implanted samples

JL Colaux; C Jeynes

doi:10.1039/c3ay41398e

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High accuracy traceable Rutherford backscattering spectrometry of ion implanted samples

JL Colaux and C Jeynes

ANALYTICAL METHODS, Vol.6(1), pp.120-129

01/01/2014

DOI: https://doi.org/10.1039/c3ay41398e

Abstract

Science & Technology

Physical Sciences

Life Sciences & Biomedicine

Technology

Chemistry

Analytical

Food Science & Technology

Spectroscopy

Chemistry

CHEMISTRY

ANALYTICAL

FOOD SCIENCE & TECHNOLOGY

SPECTROSCOPY

SCATTERING CROSS-SECTION

MONTE-CARLO-SIMULATION

BEAM ANALYSIS

CRYSTALLINE SI

RBS

CALIBRATION

ENERGY

IBA

SILICON

UNCERTAINTY

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Title: High accuracy traceable Rutherford backscattering spectrometry of ion implanted samples
Creators: JL Colaux
C Jeynes
Publication Details: ANALYTICAL METHODS, Vol.6(1), pp.120-129
Publisher: ROYAL SOC CHEMISTRY
Date published: 01/01/2014
Date submitted: 08/01/2014
Identifiers: 99511372602346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

High accuracy traceable Rutherford backscattering spectrometry of ion implanted samples

Abstract

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