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Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing
Journal article   Open access  Peer reviewed

Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing

GM Pharr, DL Callahan, SD McAdams, TY Tsui, S Anders, A Anders, JW Ager, IG Brown, CS Bhatia, SRP Silva, …
APPLIED PHYSICS LETTERS, Vol.68(6), pp.779-781
05/02/1996
DOI: https://doi.org/10.1063/1.116530

Abstract

Science & Technology Physical Sciences Physics Applied Physics PHYSICS APPLIED DIAMOND-LIKE CARBON AMORPHOUS-CARBON
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