HIGH-ACCURACY DATA FROM RUTHERFORD BACKSCATTERING SPECTRA - MEASUREMENTS OF THE RANGE AND STRAGGLING OF 60-400 KEV AS IMPLANTS INTO SI

C JEYNES; AC KIMBER

doi:10.1088/0022-3727/18/8/001

Back

Journal article

HIGH-ACCURACY DATA FROM RUTHERFORD BACKSCATTERING SPECTRA - MEASUREMENTS OF THE RANGE AND STRAGGLING OF 60-400 KEV AS IMPLANTS INTO SI

C JEYNES and AC KIMBER

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.18(8), pp.L93-L97

01/01/1985

DOI: https://doi.org/10.1088/0022-3727/18/8/001

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1985ANY5000001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

20 Record Views

18 Times Cited - Web of Science

Details

Title: HIGH-ACCURACY DATA FROM RUTHERFORD BACKSCATTERING SPECTRA - MEASUREMENTS OF THE RANGE AND STRAGGLING OF 60-400 KEV AS IMPLANTS INTO SI
Creators: C JEYNES
AC KIMBER
Publication Details: JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.18(8), pp.L93-L97
Publisher: IOP PUBLISHING LTD
Date published: 01/01/1985
Date submitted: 17/05/2017
Identifiers: 99510977402346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

HIGH-ACCURACY DATA FROM RUTHERFORD BACKSCATTERING SPECTRA - MEASUREMENTS OF THE RANGE AND STRAGGLING OF 60-400 KEV AS IMPLANTS INTO SI

Abstract

Files and links (1)

Metrics

Details

Usage Policy