HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS

SE DONNELLY; F BODART; KM BARFOOT; R WERZ; RP WEBB

doi:10.1016/0040-6090(82)90491-6

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HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS

Journal article

Peer reviewed

HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS

SE DONNELLY, F BODART, KM BARFOOT, R WERZ and RP WEBB

THIN SOLID FILMS, Vol.94(4), pp.289-305

01/01/1982

DOI: https://doi.org/10.1016/0040-6090(82)90491-6

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

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Title: HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS
Creators: SE DONNELLY
F BODART
KM BARFOOT
R WERZ
RP WEBB
Publication Details: THIN SOLID FILMS, Vol.94(4), pp.289-305
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Date published: 01/01/1982
Date submitted: 17/05/2017
Identifiers: 99516686502346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS

Abstract

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