GaBi alloy liquid metal ion source for microelectronics research

L Bischoff; W Pilz; T Ganetsos; RG Forbes; C Akhmadaliev

doi:10.1016/j.ultramic.2007.02.022

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Journal article

GaBi alloy liquid metal ion source for microelectronics research

L Bischoff, W Pilz, T Ganetsos, RG Forbes and C Akhmadaliev

ULTRAMICROSCOPY, Vol.107(9), pp.865-868

01/09/2007

DOI: https://doi.org/10.1016/j.ultramic.2007.02.022

Abstract

Science & Technology

Technology

Microscopy

MICROSCOPY

GaBi alloy liquid metal ion source

mass spectra

abundance

SILICON

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Title: GaBi alloy liquid metal ion source for microelectronics research
Creators: L Bischoff
W Pilz
T Ganetsos
RG Forbes
C Akhmadaliev
Publication Details: ULTRAMICROSCOPY, Vol.107(9), pp.865-868
Publisher: ELSEVIER SCIENCE BV
Date published: 01/09/2007
Date submitted: 17/05/2017
Identifiers: 99513970002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

GaBi alloy liquid metal ion source for microelectronics research

Abstract

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