Formation of planar waveguides by implantation of O into cubic silicon carbide

SM Jackson; GT Reed; AS Way; KJ Kirkby

doi:10.1088/0022-3727/34/3/302

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Journal article

Formation of planar waveguides by implantation of O into cubic silicon carbide

SM Jackson, GT Reed, AS Way and KJ Kirkby

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.34(3), pp.257-268

07/02/2001

DOI: https://doi.org/10.1088/0022-3727/34/3/302

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

CHEMICAL-VAPOR-DEPOSITION

ANNEALING ANALYSIS

WAVE-GUIDES

DEVICES

PRECIPITATION

SYSTEMS

OXYGEN

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Title: Formation of planar waveguides by implantation of O into cubic silicon carbide
Creators: SM Jackson
GT Reed
AS Way
KJ Kirkby
Publication Details: JOURNAL OF PHYSICS D-APPLIED PHYSICS, Vol.34(3), pp.257-268
Publisher: IOP PUBLISHING LTD
Date published: 07/02/2001
Date submitted: 17/05/2017
Identifiers: 99514196702346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Formation of planar waveguides by implantation of O into cubic silicon carbide

Abstract

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