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Formation of PZT micro-scale structures using electrohydrodynamic atomization filling of metallic moulds
Journal article   Peer reviewed

Formation of PZT micro-scale structures using electrohydrodynamic atomization filling of metallic moulds

D Wang, SA Rocks and RA Dorey
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.30(8), pp.1821-1826
01/06/2010

Abstract

Science & Technology Technology Materials Science Ceramics Materials Science MATERIALS SCIENCE CERAMICS PZT Films Suspensions Micromoulding Ferroelectric properties THICK-FILMS ULTRASONIC TRANSDUCERS SOL-GEL FABRICATION CERAMICS SUSPENSION DEPOSITION ACTUATOR MEMS
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