Formation of PZT crack-free thick films by electrohydrodynamic atomization deposition

D Wang; MJ Edirisinghe; RA Dorey

doi:10.1016/j.jeurceramsoc.2008.04.013

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Formation of PZT crack-free thick films by electrohydrodynamic atomization deposition

Journal article

Peer reviewed

Formation of PZT crack-free thick films by electrohydrodynamic atomization deposition

D Wang, MJ Edirisinghe and RA Dorey

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.28(14), pp.2739-2745

01/10/2008

DOI: https://doi.org/10.1016/j.jeurceramsoc.2008.04.013

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

PZT

films

suspensions

electrohydrodynamic atomization

PIEZOELECTRIC PROPERTIES

CERAMICS

FABRICATION

TRANSDUCER

ACTUATOR

MODES

MEMS

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Title: Formation of PZT crack-free thick films by electrohydrodynamic atomization deposition
Creators: D Wang
MJ Edirisinghe
RA Dorey
Publication Details: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.28(14), pp.2739-2745
Publisher: ELSEVIER SCI LTD
Date published: 01/10/2008
Date submitted: 17/05/2017
Identifiers: 99512431602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Formation of PZT crack-free thick films by electrohydrodynamic atomization deposition

Abstract

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