Fabrication of silicon-blazed gratings for couplers

TW Ang; GT Reed; AGR Evans; PR Routley; MR Josey

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Fabrication of silicon-blazed gratings for couplers

Journal article

Peer reviewed

Fabrication of silicon-blazed gratings for couplers

TW Ang, GT Reed, AGR Evans, PR Routley and MR Josey

FIBER AND INTEGRATED OPTICS, Vol.19(1), pp.25-29

01/01/2000

Abstract

Science & Technology

Physical Sciences

Optics

OPTICS

blazed gratings

electron beam lithography

grating couplers

ion beam etching

OPTICAL-PHASE MODULATOR

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Title: Fabrication of silicon-blazed gratings for couplers
Creators: TW Ang
GT Reed
AGR Evans
PR Routley
MR Josey
Publication Details: FIBER AND INTEGRATED OPTICS, Vol.19(1), pp.25-29
Publisher: TAYLOR & FRANCIS LTD
Date published: 01/01/2000
Date submitted: 17/05/2017
Identifiers: 99515396402346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Fabrication of silicon-blazed gratings for couplers

Abstract

Files and links (1)

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