- Title
- Fabrication and tailoring of silicon photonic devices via focused Ion
- Creators
- S HoweWR HeadleyDC CoxGZ MashanovichDJ ThomsonGT Reed
- Publication Details
- Proceedings of SPIE - The International Society for Optical Engineering, Vol.7220
- Date published
- 2009
- Date submitted
- 17/05/2017
- Identifiers
- 99515486802346
- Academic Unit
- University of Surrey
- Resource Type
- Journal article
Journal article
Fabrication and tailoring of silicon photonic devices via focused Ion
Proceedings of SPIE - The International Society for Optical Engineering, Vol.7220
2009
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