Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

RA Dorey; F Dauchy; D Wang; R Berriet

doi:10.1109/TUFFC.2007.560

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Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

Journal article

Peer reviewed

Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

RA Dorey, F Dauchy, D Wang and R Berriet

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol.54(12), pp.2462-2468

01/12/2007

DOI: https://doi.org/10.1109/TUFFC.2007.560

Abstract

Science & Technology

Technology

Acoustics

Engineering

Electrical & Electronic

Engineering

ACOUSTICS

ENGINEERING

ELECTRICAL & ELECTRONIC

HIGH-FREQUENCY ULTRASOUND

COMPOSITE

FILM

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Title: Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers
Creators: RA Dorey
F Dauchy
D Wang
R Berriet
Publication Details: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol.54(12), pp.2462-2468
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Date published: 01/12/2007
Date submitted: 17/05/2017
Identifiers: 99513509602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

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