FLUORINE ENHANCED OXIDATION OF SILICON AT LOW-TEMPERATURES

A KAZOR; C JEYNES; IW BOYD

doi:10.1063/1.112918

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FLUORINE ENHANCED OXIDATION OF SILICON AT LOW-TEMPERATURES

Journal article

Peer reviewed

FLUORINE ENHANCED OXIDATION OF SILICON AT LOW-TEMPERATURES

A KAZOR, C JEYNES and IW BOYD

APPLIED PHYSICS LETTERS, Vol.65(12), pp.1572-1574

19/09/1994

DOI: https://doi.org/10.1063/1.112918

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

THERMAL-OXIDATION

KINETICS

MIXTURES

NF3

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Title: FLUORINE ENHANCED OXIDATION OF SILICON AT LOW-TEMPERATURES
Creators: A KAZOR
C JEYNES
IW BOYD
Publication Details: APPLIED PHYSICS LETTERS, Vol.65(12), pp.1572-1574
Publisher: AMER INST PHYSICS
Date published: 19/09/1994
Date submitted: 17/05/2017
Identifiers: 99512913902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

FLUORINE ENHANCED OXIDATION OF SILICON AT LOW-TEMPERATURES

Abstract

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