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Electrohydrodynamic atomization deposition of PZT sol-gel slurry and sol infiltration on the films
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Electrohydrodynamic atomization deposition of PZT sol-gel slurry and sol infiltration on the films

D Wang, SA Rocks and RA Dorey
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.32(8), pp.1651-1658
01/07/2012

Abstract

Science & Technology Technology Materials Science Ceramics Materials Science MATERIALS SCIENCE CERAMICS Films Suspensions Ferroelectric properties PZT Electrohydrodynamic atomization LEAD-ZIRCONATE-TITANATE PIEZOELECTRIC THICK-FILMS MEMS COMPOSITE IMPROVEMENT TRANSDUCER ACTUATOR SYSTEMS MODES
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