Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films

D Wang; X Li; P Shi; X Zhao; J Liang; T Ren; W Dong; R Yang; Y Wang; RA Dorey

doi:10.1016/j.ceramint.2016.04.160

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Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films

Journal article

Peer reviewed

Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films

D Wang, X Li, P Shi, X Zhao, J Liang, T Ren, W Dong, R Yang, Y Wang and RA Dorey

CERAMICS INTERNATIONAL, Vol.42(11), pp.12623-12629

15/08/2016

DOI: https://doi.org/10.1016/j.ceramint.2016.04.160

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

Electrohydrodynamic atomization deposition

PZT thick film

Mechanical polishing

ZIRCONATE-TITANATE FILMS

ELECTROPHORETIC DEPOSITION

PIEZOELECTRIC PROPERTIES

MEMS

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Title: Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films
Creators: D Wang
X Li
P Shi
X Zhao
J Liang
T Ren
W Dong
R Yang
Y Wang
RA Dorey
Publication Details: CERAMICS INTERNATIONAL, Vol.42(11), pp.12623-12629
Publisher: ELSEVIER SCI LTD
Date published: 15/08/2016
Date submitted: 17/05/2017
Identifiers: 99514577102346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films

Abstract

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