Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system

M Obradovic; D Pjevic; D Perusko; A Grce; M Milosavljevic; KP Homewood; Z Siketic

doi:10.1016/j.tsf.2015.03.074

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Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system

Journal article

Peer reviewed

Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system

M Obradovic, D Pjevic, D Perusko, A Grce, M Milosavljevic, KP Homewood and Z Siketic

THIN SOLID FILMS, Vol.591, pp.164-168

30/09/2015

DOI: https://doi.org/10.1016/j.tsf.2015.03.074

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

Aluminum nitride

Titanium nitride

Multilayers

Helium

Implantation

Bubble formation

Delamination

RADIATION-DAMAGE

TIN COATINGS

TOLERANCE

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Title: Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system
Creators: M Obradovic
D Pjevic
D Perusko
A Grce
M Milosavljevic
KP Homewood
Z Siketic
Publication Details: THIN SOLID FILMS, Vol.591, pp.164-168
Publisher: ELSEVIER SCIENCE SA
Date published: 30/09/2015
Date submitted: 17/05/2017
Identifiers: 99514254802346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system

Abstract

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