EVALUATION OF SILICON-ON-INSULATOR SUBSTRATES USING PHOTOCONDUCTIVE FREQUENCY-RESOLVED SPECTROSCOPY

MA LOURENCO; KP HOMEWOOD; PLF HEMMENT

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EVALUATION OF SILICON-ON-INSULATOR SUBSTRATES USING PHOTOCONDUCTIVE FREQUENCY-RESOLVED SPECTROSCOPY

Journal article

Peer reviewed

EVALUATION OF SILICON-ON-INSULATOR SUBSTRATES USING PHOTOCONDUCTIVE FREQUENCY-RESOLVED SPECTROSCOPY

MA LOURENCO, KP HOMEWOOD and PLF HEMMENT

JOURNAL OF APPLIED PHYSICS, Vol.74(11), pp.6754-6758

01/12/1993

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

THERMAL DONORS

CZOCHRALSKI SILICON

SIMOX STRUCTURES

OXYGEN DONOR

DEFECTS

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Title: EVALUATION OF SILICON-ON-INSULATOR SUBSTRATES USING PHOTOCONDUCTIVE FREQUENCY-RESOLVED SPECTROSCOPY
Creators: MA LOURENCO
KP HOMEWOOD
PLF HEMMENT
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.74(11), pp.6754-6758
Publisher: AMER INST PHYSICS
Date published: 01/12/1993
Date submitted: 17/05/2017
Identifiers: 99513208502346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

EVALUATION OF SILICON-ON-INSULATOR SUBSTRATES USING PHOTOCONDUCTIVE FREQUENCY-RESOLVED SPECTROSCOPY

Abstract

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