EFFECT OF NITRIDATION RATE ON THE COMPOSITION AND CONDUCTIVITY OF TITANIUM NITRIDE FILMS PREPARED FROM SOL-GEL TITANIA

JL KEDDIE; J LI; JW MAYER; EP GIANNELIS

doi:10.1111/j.1151-2916.1991.tb06869.x

Back

EFFECT OF NITRIDATION RATE ON THE COMPOSITION AND CONDUCTIVITY OF TITANIUM NITRIDE FILMS PREPARED FROM SOL-GEL TITANIA

Journal article

Peer reviewed

EFFECT OF NITRIDATION RATE ON THE COMPOSITION AND CONDUCTIVITY OF TITANIUM NITRIDE FILMS PREPARED FROM SOL-GEL TITANIA

JL KEDDIE, J LI, JW MAYER and EP GIANNELIS

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol.74(11), pp.2937-2940

01/11/1991

DOI: https://doi.org/10.1111/j.1151-2916.1991.tb06869.x

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

ION-IMPLANTATION

DEPOSITION

NITROGEN

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1991GQ45300034&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

37 Record Views

13 Times Cited - Web of Science

See more details

Details

Title: EFFECT OF NITRIDATION RATE ON THE COMPOSITION AND CONDUCTIVITY OF TITANIUM NITRIDE FILMS PREPARED FROM SOL-GEL TITANIA
Creators: JL KEDDIE
J LI
JW MAYER
EP GIANNELIS
Publication Details: JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol.74(11), pp.2937-2940
Publisher: AMER CERAMIC SOC
Date published: 01/11/1991
Date submitted: 17/05/2017
Identifiers: 99511663702346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

EFFECT OF NITRIDATION RATE ON THE COMPOSITION AND CONDUCTIVITY OF TITANIUM NITRIDE FILMS PREPARED FROM SOL-GEL TITANIA

Abstract

Files and links (1)

Metrics

Details

Usage Policy