Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy

Vlad Stolojan; A. C. Ferrari; A. Libassi; BK Tanner; Jun Yuan; L. M. Brown; S. E. Rodil; B. Kleinsorge; J. Robertson

doi:10.1103/PhysRevB.62.11089

$Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy$

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Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy

Vlad Stolojan, A. C. Ferrari, A. Libassi, BK Tanner, Vlad Stolojan, Jun Yuan, L. M. Brown, S. E. Rodil, B. Kleinsorge and J. Robertson

Physical review. B, Condensed matter, Vol.62(16), pp.11089-11103

15/10/2000

DOI: https://doi.org/10.1103/PhysRevB.62.11089

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Title: Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy
Creators: Vlad Stolojan (Author)
A. C. Ferrari (Author)
A. Libassi (Author)
BK Tanner (Author)
Vlad Stolojan (Author)
Jun Yuan (Author)
L. M. Brown (Author)
S. E. Rodil (Author)
B. Kleinsorge (Author)
J. Robertson (Corresponding Author)
Publication Details: Physical review. B, Condensed matter, Vol.62(16), pp.11089-11103
Date published: 15/10/2000
Identifiers: 99816465102346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy

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