DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV

U BANGERT; C JEYNES; P GOODHEW; IH WILSON

doi:10.1016/0042-207X(84)90121-0

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DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV

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DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV

U BANGERT, C JEYNES, P GOODHEW and IH WILSON

VACUUM, Vol.34(1-2), pp.163-166

01/01/1984

DOI: https://doi.org/10.1016/0042-207X(84)90121-0

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Science & Technology

Technology

Physical Sciences

Materials Science

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Physics

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Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

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Title: DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV
Creators: U BANGERT
C JEYNES
P GOODHEW
IH WILSON
Publication Details: VACUUM, Vol.34(1-2), pp.163-166
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Date published: 01/01/1984
Date submitted: 17/05/2017
Identifiers: 99513441902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

DAMAGE EFFECTS IN SILICON AND MNOS STRUCTURES CAUSED BY BEAMS OF IONIZED AND NEUTRAL ARGON ATOMS WITH ENERGIES BELOW 5 KEV

Abstract

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