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Comparison of the ablation plumes arising from ArF laser ablation of graphite, silicon, copper, and aluminum in vacuum
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Comparison of the ablation plumes arising from ArF laser ablation of graphite, silicon, copper, and aluminum in vacuum

F Claeyssens, SJ Henley and MNR Ashfold
JOURNAL OF APPLIED PHYSICS, Vol.94(4), pp.2203-2211
15/08/2003

Abstract

Science & Technology Physical Sciences Physics Applied Physics PHYSICS APPLIED MASS-SPECTROMETRY PLASMA PLUMES KNUDSEN-LAYER THIN-FILMS DEPOSITION TEMPERATURE EXCIMER VAPORIZATION EXPANSION DYNAMICS
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